ASPE Extended Abstract Template
نویسندگان
چکیده
INTRODUCTION Noncontact transfer devices are demanded when silicon wafers or glass plates are carried in clean environment. Because contact of such products with a conveyer belt damaged their surface, non-contact transfer devices are needed for the use in clean environment. Many transfer devices using ultrasonic, electromagnetic or electrostatic levitation have been proposed. The authors also have proposed a two-dimensional transfer method using ultrasonic levitation [1]. Because it utilizes repulsive force, gap sensors to measure the levitation distance are not needed.
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